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Prof. Dr. Martin Hoffmann (Director)
Institut für Mikro- und Nanotechnologien
TU Ilmenau
Gustav-Kirchhoff-Str. 7
D-98693 Ilmenau
Germany



+49 (0) 3677 . 69 3402
+49 (0) 3677 . 69 3499 (fax)

Institute of Micro- and Nanotechnologies

Institute of Micro- and Nanotechnologies, Technische Universität Ilmenau

The research projects are based on micro- and nanotechnologies, which are connected to one another through micro-nano-integration. The system solutions thus generated are primarily directed to applications in life sciences, energy efficiency and photonics. The interdisciplinary orientation of the institute, from material sciences via system integration up to analytics, allows for an entirely new approach to research projects.

With regard to the future scientific development of the institute in this field, high-priority areas of research have been identified. Due to their relevance and the richness of the expertise, optical microsystems can be assumed to have particularly great potential for innovation in the future.

The Center for Micro- and Nanotechnologies (ZMN) provides the technological platform for research in the IMN MacroNano®. The platforms extend the available process portfolio for advanced Optical MEMS:

As an operating unit of the TU Ilmenau, the ZMN provides about 1,300 m² laboratory space, including 680 m² in clean rooms of different classes (about 380 m² of class 10,000, 300 m² of class 1,000 and, in the lithography area, class 100). In addition, the ZMN has specialized labs for work with biological samples (safety level S1) or the installation of high-precision measuring equipment that makes possible accuracies in the nanometer range. The necessary peripheral equipment and infrastructure of a top-grade lab building - from central gas and ultraclean water supply to professional disposal and recycling of reaction products and contaminated media - is a self-evident part of the spectrum of services offered by the ZMN.