YOU'RE HERE: » OptiMi » Research » Phase 1:... » Technology Platforms
3D Woodpile Structure

Technology Platforms

Developing technology platforms

The following facility-spreading platform technologies, together with existing technologies of the partner institutions, build up the basis for developing prototypes.

Platform I: Si based optical micro system (MEMS)

Partner: TU Ilmenau

The available Si-MEMS technology for optical MEMS needed to be extended, especially by adding a reliable etching technology for thick silica or glass layers. For this, a state-of-the-art etching system based on ICP-etching has been installed and the processes has been optimised for high-rate etching of silica and of stacks of optical materials as used in dichroitic layers. Finally, design rules for etching of silica-based optical elements has been developed as a platform technology for optical MEMS.

Platform II: Ultra precision processing

Partner: TU Ilmenau

A reliable technology for the fabrication of optical grade surfaces within more complex microsystems has been established. The upgrade from a 4-axis to a 5-axis machining centre has even enhanced the variety and quality of realisable surface profiles. The installation of sophisticated measurement equipment in the laboratory drastically shortens the cycle times within the optimisation loop. During this process the focus laid in the identification of systematic disturbances and the compensation of their influence on the fabrication results. To cover all different types of functional structures that are characteristic within the project OptiMi, also a very important aspect under investigation was the utmost flexibility of the CNC-programming (microoptics, microfluidics, microsensors…).

Platform III: Opto electronics

Partner: TU Ilmenau

The reached aim was the enhancement of precise production the research on optoelectronic microsystems with respect to production and accuracy. Within this frame is the supply of such microsystems for the application e.g. for the demonstrator project micro optical bioreactor.

Platform IV: Development of laser based bond technologies

Partner: FSU Jena

Solderjet Bumping has been fundamentally investigated: Fundamental studies of the fixation (position accuracy, tensions, long-term stability, etc.) of optical and opto-electronic components has been pursued in order to characterise the jointing technology. By adjusting the optics of an laser, various joint geometries (line, point, area) can be bonded contactlessly. The high integration density makes the flexible operation of the processing in complex joint geometries necessary.

Platform V: 3D fs laser structuring (3DFL)

Partner: FSU Jena in cooperation with CiS GmbH

The developed exposure system and the writing strategy for Two-Photon Polymerisation allows 3D structuring of polymers without thermal accumulation effects and elaborate pre-and post-treatment processes. Subsequent hardening of the structure is no longer necessary with the used procedure. High accuracy in size and good reproducibility was demonstrated by realisation of high quality micro-and nanostructures. The optimized imaging strategy permits the production of nanostructures with a diameter of 175 nm. Grating with periods of 600 nm were realized. With the commissioning of the ALD coating and dual beam device, the technology platform has been completed.

Platform VI: Modular MORES assembling

Partner: CiS GmbH in cooperation with TU Ilmenau and FSU Jena

Assembly concepts have been developed. Through technology optimization, the development of micro-pores could be prevented. New connecting technologies were developed (e.g. Deep-Access Wire Bonding of the LED through ultra-flat Loops in the pit). The use of an additional beam shaping element with simultaneous intensified 3D integration and to this associated development and use of improved technologies for silicon-structuring and assembly allowed the integration of additional functions in the MORES® technology platform and a significant improvement in performance parameters. Target applications for these concepts are particularly in microfluidics.